OPTIMIZATION OF REACTIVE MAGNETRON SPUTTERING PARAMETERS FOR TION COATINGS DEPOSITED ON 316L STAINLESS STEEL

02.07.2026

TiON coatings were deposited on 316L stainless steel substrates by reactive magnetron sputtering under three different deposition regimes. The study aimed to determine the optimal sputtering conditions by comparing the mechanical properties, elemental composition, and corrosion behavior of the coatings. Instrumented indentation showed that the deposition regime strongly affected the mechanical response of the coatings. The highest hardness and elastic modulus were obtained for sample R3, reaching 639.3 HV and 152.6 GPa, respectively. SEM observations confirmed the formation of continuous coating layers, while EDS analysis revealed changes in elemental composition depending on the sputtering regime. The oxygen content decreased from R1 to R3, while nitrogen was detected only in the R3 coating. Electrochemical tests in 3.5 wt.% NaCl solution showed that R1 exhibited the lowest corrosion current density of 1.13 × 10⁻⁷ A/cm² and the lowest corrosion rate of 0.00231 mm/year. R3 demonstrated intermediate corrosion resistance but the best mechanical performance. Based on the combined mechanical and electrochemical results, the R3 regime was identified as the optimal sputtering condition for obtaining high-hardness TiON coatings with satisfactory corrosion resistance.

TiON coating, reactive magnetron sputtering, 316L stainless steel, microhardness, corrosion resistance, SEM, EDS.